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Semiconsoft - 적외선 박막 두께 측정 센서    download

(Thin Film Thickness Measurement and more!)

How it works

1. Light reflectance and transmittance diagram
2. Reflectance from a thick polymer layer on Si
3. Polymer Reflectance fit with incorrect refractive index
4. Fit to measured data, both thickness and refractive index are adjusted
5. Refractive index dispersion determined from the fit to measured data
6. Reflectance of thick polymer film on polymer substrate
7. Results of thickness measurement using FFT method
8. Reflectance spectra of gold coating,1.3nm and 2.6nm polymer films
9. Results of the measurement of 1.3nm polymer film.

Specifications

model wavelength range spectrometer/detector light source thickness specification
Vis 400-1100 Spectrometer F4/Si CCD
3600 pixels/ ADC- 16 bit
Tungsten-Halogen 15nm- 75μm Precision - 0.01nm or 0.01%
Accuracy - 0.2% or 1nm
Stability - 0.02nm or 0.03%
Spot size - 2mm stadard , down to 3 um
Sample size - from 5mm
UVVisSR 200-1100 Spectrometer F4/Si CCD 2048 pixels/ ADC- 16 bit Deuterium/
Tungsten-Halogen
1nm-75μm Precision - 0.01nm or 0.01%
Accuracy - 0.2% or 1nm
Stability - < 0.02nm or 0.03%
Spot size - 2mm stadard , down to 3 um
Sample size - from 1mm
HRVis 700-1000 Spectrometer F4/Si CCD 2048 pixels/ ADC- 16 bit /resolution Tungsten-Halogen 1μm-400μm Precision - 0.01nm or 0.01%
Accuracy - 0.1% or 1nm
Stability - < 0.02nm or 0.03%
Spot size - 0.5mm stadard , down to 3 um
Sample size - from 1mm
Measurement time - <50ms, 15Hz
UVVis-RT 200-1000 F4/Si CCD 2048 pixels/ ADC 16 bit/Optical Switch(Reflectance & Transmittance) Tungsten-Halogen 1nm-75μm Precision - 0.01nm or 0.01%
Accuracy - 0.2% or 1nm
Stability - 0.05nm or 0.03%
Spot size - 2mm stadard
Sample size - from 1mm
NIR 900-1700 F2 Spectrometer InGaAs CCD 512 pixels: ADC- 16 bit Tungsten-Halogen 50nm- 85μm -
VisNIR 400-1700 Two spectrometer channels/ detectors (F4 Si 3600 pixels CCD and F2 InGaAs 512 pixels PDA) /ADC- 16 bit Tungsten-Halogen 10nm- 85μm -
UVVis-NIR 200-1700 Two spectrometer channels/ detectors (F4 Si 3600 pixels CCD and InGaAs 512)/ ADC 16 bit Deuterium/Tungsten-Halogen 1nm-85μm -
VisXT 800-870 F4 spectrometer/Si 2048 pixels CCD Tungsten-Halogen 10μm-1400 μm -