Applications (Scan area) | Example | Time scanning / number of points |
---|---|---|
Height and shape inspection on bumped wafer
(1.91 mm x 2.2 mm) |
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0.11 sin 1 pass |
Flatness measurement on watch movement (22.2 mm x 10.5 mm) |
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4.7 sin 5 passes |
Roughness measurement on metal (15.9 mm x 7.4 mm) |
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3.17 sin 5 passes |